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Vacuum flange interface | ISO-K63 | ISO-K80 ISO-K100 | ISO-K160 | ||
Driver |
| Open and close: Manual |
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Valve travel | 35mm | 42mm 46mm | 46mm | ||
Travel limit | yes | yes yes | yes | ||
Angle valve flow conductance Switching frequency Service life | 165L/S | 200L/S 300L/S | 850L/S | ||
<10/min | <10/min <10/min | <10/min | |||
| ≥500000 |
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Vacuum leak rate |
| 1x10⁻¹⁰pa- m³/sec(1x10⁻⁹mbar-L/sec) |
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Maximum pressure inside the valve Minimum operating pressure inside the valve |
| 5bar(absolute) |
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| 1x10⁻⁸mbar |
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Maximum operating pressure inside the valve Pressure difference range Closing direction Opening direction |
| 2bar |
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| AP |
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| ≤5bar |
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| ≤2bar |
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Temperature Working environment Knob Driver Screw |
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| oC~50C |
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| ≤150°c |
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| >150C |
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| ≤150°c |
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| >150C |
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Installation direction Flow direction |
| Any |
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| Any |
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Material |
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Body |
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Valve body | High-purity aluminum alloy (green low-carbon hydroelectric aluminum) |
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Bellows assembly | SUS304/SUS316L |
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Sleeve | Brass |
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Knob | Al 6063-T5 |
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Screw/pressure rod | SUS304 |
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Sealing ring | F KM (fluoro rubber) |
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weight 3.2kg 4.6kg 5.9kg 7.6kg |
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