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Vacuum Valve-Pneumatically Actuated With Soft-Pump Function

Vacuum Valve-Pneumatically Actuated With Soft-Pump Function

Rich configuration: Soft pumping valves are ideal for high-flow vacuum scenarios that require precise calibration with a large potential flow conductance spectrum. The large flow conductance is achieved by combining two high-vacuum angle valves, the main valve interacting with a compact bypass valve, and a variety of configurations are available or customized.
Precise adjustment: The adjustment wheel on the bypass valve side can fine-tune the soft pumping effect. The adjustment wheel has 11 position marks, which is suitable for calibration and adjustment of a very wide flow conductance spectrum. Process reproduction: These marks facilitate the reproduction of settings and the copying of such settings to other valves that will run the same settings, especially in applications with changing pressure conditions, large load chamber volumes, and demanding requirements (such as the manufacture of solar cells or displays).
Strong adaptability: Suitable for clean air, clean nitrogen and a variety of low-corrosive gases.

Consultation

Functional Features Technical Datasheet Overall Dimension

Specifications (DN): 63/16mm, 100/25mm, 160/40mm, other (customized)
Valve structure: normally closed; normally open (optional)
Connection flange: ISO-K, ISO-KF (optional)
Leakage rate: 1x10⁻¹⁰Pa·m³/sec (1x10⁻⁹mbar·L/sec)
Drive mode: pneumatic
Drive air source pressure range: 3.5-8bar
Typical air source pressure: 6bar
Solenoid valve rated voltage: DC24V, AC220V (optional)
Shaft core sealing method: bellows seal or shaft seal
Body material: high-purity aluminum alloy, stainless steel (optional)
Seal ring material: FKM (fluororubber)
Installation method: any
Heat resistance temperature: 150℃
Flow conductance: 4.5L/S-850L/S)
Service life: ≥500,000 times or cycles

Features:	Wide adjustable range of flow conductance spectrum Modular combination of different main valves and bypass valves
	Easily reproduce flow patterns and process settings Full functionality even under high voltage differential

Advantage:	Avoid turbulence and vacuum pressure pulses Large conductance range, precise regulation and calibration
Advantage:	Long maintenance-free operation Minor maintenance can be performed quickly and easily
Nominal voltage DC voltage AC voltage
	24V
	220V(Optional)
Vacuum flange interface	ISO-K63(DN16 bypass) ISO-K100(DN25 bypass) ISO-K160(DN40 bypass)
Driver Driver Compressed air supply line size Pressure range	Open: Pneumatic
	Closing: Pneumatic (spring optional)
	Closing: Pneumatic (spring optional)
	Ø6mm(Optional)
	3.5~8x10⁵ Pa
Valve travel	35mm 46mm 46mm
Angle valve flow conductance Switching frequency Opening time Closing time	5~ 165L/S 20~300L/S 50~850L/S
	＜10/min ＜10/min ＜10/min
	＜0 .2s
	＜0 .2s
Service life	≥500000 Second-rate
Vacuum leak rate	1x10⁻¹⁰Pa·m³/sec（1x10-⁻⁹mbar·L/sec）
Maximum pressure inside the valve Minimum operating pressure inside the valve	5bar(absolute)
	1x10⁻⁸mbar
Maximum operating pressure inside the valve Pressure differential range Closing direction Opening direction	2bar
	Δp
	≤5bar
	≤5bar
	≤2bar
Temperature Working environment Bake body Cylinder Driver Solenoid valve
	0℃~50℃
	≤150℃
	150℃
	150℃
	20~70℃
Installation direction Flow direction	Any
Installation direction Flow direction	Any
Material Body Valve body Bellows assembly Spring Sealing ring Switch indicator box Visual position indicator Magnetic indicator (optional)

	High-purity aluminum alloy (green low-carbon hydropower photovoltaic aluminum)
	SUS 304/SUS 316L
	Spring steel
	FKM(fluororubber)
	ABS/PC
	OMRON Ohm's Dragon (lifespan more than 30 million times)
	DMS
weight	3.5kg 7.8kg 15.9kg