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DC Voltage | 24V | Close Direction | ≤5bar | |||
AC Voltage | 220V(optional) | Opening direction | ≤2bar | |||
Vacuum flange interface | KF16 | KF25 | KF40 | KF50 | Temperature | |
| Open: Pneumatic | Working Environment | 0℃~50℃ | |||
Driver | Closure: Spring | Baking body | ≤150℃ | |||
Compressed air supply line size | 06mm(optional) | Cylinder | 150℃ | |||
Pressure range | 3.5~8x10⁵Pa | Driver | 150℃ | |||
Cylinder displacement | 4cm³ | 11cm | 35cm³ | 50cm³ | The electromagnetic valve | 20~70℃ |
Valve travel | 6.1mm | 8.6mm | 14.1mm | 21.2mm | Installation direction | Any |
Angle valve flow conductance | 5L/S | 20L/S | 50L/S | 85L/S | Flow direction | Any |
On-off level | <10/min | <10/min | <10/min | <10/min | Material | |
Opening time | <0.2s | Valve body | SUS304 | |||
Closing time |
| <0.2s | Bellows Assemblies | SUS 304/SUS 316L | ||
Service life | ≥500000 | spring | Spring steel | |||
Vacuum leak rate | 1x10¹⁰Pa·m³/sec(1x10-⁹mbar·L/sec) | Sealing ring | FKM(Fluororubber) | |||
Maximum pressure inside the valve | 5bar(absolute) | Switch indicator box | ABS/PC | |||
Minimum operating pressure inside the valve | 1x10°mbar | Visual position indicator | OMRON (lifespan over 30 million times) | |||
Maximum operating pressure inside the valve | 2bar | Magnetic indicator (optional) | DMS | |||
Differential pressure range | △p | weight | 0.35kg 0.78kg 1.62kg 1.96kg |