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Vacuum flange interface | KF16 | KF25 KF40 | KF50 | Opening direction | ≤2bar |
Driver |
| Open: Manual |
| Temperature |
|
| Close: Manual |
| Working Environment | 0℃~50℃ | |
Valve travel | 6.1mm | 8.6mm 14.1mm | 21.2mm | Baking body | ≤150℃ |
Angle valve flow conductance | 5L/S | 20L/S 50L/S | 85L/S | Cylinder | 150℃ |
On-off level | <10/min | <10/min <10/min | <10/min | Driver | 150℃ |
Opening time |
| <0.2s |
| The electromagnetic valve | 20~70℃ |
Closing time |
| <0.2s |
| Installation direction | Any |
Service life |
| ≥500000 |
| Flow direction | Any |
Vacuum leak rate | 1x10-¹⁰Pa·m³/sec(1x10-⁹mbar·L/sec) | Material |
| ||
Maximum pressure inside the valve | 5bar(absolute) | Valve body | SUS304 | ||
Minimum operating pressure inside the valve | 1x10-⁸mbar | Bellows Assemblies | SUS 304/SUS 316L | ||
Maximum operating pressure inside the valve |
| 2bar |
| Sealing ring | FKM(Fluororubber) |
Differential pressure range |
| △p |
| ||
Close Direction |
| ≤5bar |
| weight | 0.35kg 0.78kg 1.62kg 1.96kg |