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Vacuum flange interface | KF16 | KF25 | KF40 | KF50 | Opening direction | ≤2bar |
Driver |
| Open: Manual | Temperature |
| ||
Close: Manual | Working Environment | 0℃~50℃ | ||||
Valve travel | 6.1mm | 8.6mm | 14.1mm | 21.2mm | Baking body | ≤150℃ |
Angle valve flow conductance | 5L/S | 20L/S | 50L/S | 85L/S | Cylinder | 150℃ |
On-off level | <10/min | <10/min | <10/min | <10/min | Driver | 150℃ |
Opening time | <0.2s | The electromagnetic valve | 20~70℃ | |||
Closing time |
| <0.2s | Installation direction | Any | ||
Service life | ≥500000 | Flow direction | Any | |||
Vacuum leak rate | 1x10-¹⁰Pa·m³/sec( | x10·⁹mbar·L/sec) | Material |
| ||
Maximum pressure inside the valve | 5bar(absolute) | Valve body | High purity aluminum alloy | |||
Minimum operating pressure inside the valve | 1x10-⁸mbar | Bellows Assemblies | SUS304/SUS 316L | |||
Maximum operating pressure inside the valve |
| 2bar | ||||
Differential pressure range |
| △p | Sealing ring | FKM(Fluororubber) | ||
Close Direction |
| ≤5bar | weight | 0.35kg 0.78kg 1.62kg 1.96kg |